Webperformance of semiconductors. Laser-induced photocarrier radiometry (PCR) [1], whichisaformofdynamicfrequency-domainphotoluminescence,hasbeendeveloped This article is part of the selected papers presented at the 19th International Conference on Photoacoustic and Photothermal Phenomena. B Junyan Liu [email protected] B Yang … WebPhotocarrier Radiometry (PCR),5 an all-optical (contact-less), dynamic (frequency-domain), spectrally gated, and diffusion-wave-based photoluminescence (PL) characteriza-tion technique, has been demonstrated to be capable of quan-titatively characterizing bulk, surface, interface, junction, and trap-state properties of various semiconductor ...
Hydrogen-Assisted Defect Engineering of Doped Poly-Si Films for ...
WebMay 23, 2013 · Spectroscopic ellipsometry (SE), photocarrier radiometry (PCR) and photoluminescence (PL) techniques were employed to measure the ultra-shallow junction (USJ) wafers. These USJ wafers were prepared by As+ ion implantation at energies of 0.5–5 keV, at a dose of 1×1015 As+/cm2 and spike annealing. Experimentally the damaged layer … WebApr 18, 2014 · The activation and recrystallization in arsenic ion-implanted silicon under excimer laser (193 nm) irradiation is investigated using photocarrier radiometry (PCR). Arsenic ion-implanted silicon wafers with a dose of $$1 \\times 10^{15}\\,\\mathrm{cm}^{-2}$$ 1 × 10 15 cm - 2 and an energy of 1 keV were irradiated at different laser parameters, … fluted chamber rifle
Two-beam cross-modulation photocarrier radiometry: principles …
WebMar 1, 2006 · A two-beam photo-carrier radiometry (PCR) technique of semiconductors has been developed. The technique operates on the superposition of superband-gap and subband-gap laser beams which results in the cross-modulation of the backscattered subband-gap laser intensity by the harmonically varying free-carrier-wave density … WebMay 1, 2003 · Photocarrier radiometry (PCR) [4, 5] has been proved to be highly sensitive to implantation dose [6,7] as well as defect states [4,8], thus promising for in-line dose monitoring and high ... WebNov 26, 2024 · Ultraviolet photocarrier radiometry (UV-PCR) was used for the characterization of thin-film (nanolayer) intrinsic hydrogenated amorphous silicon (i-a-Si:H) on c-Si. The small absorption depth (approximately 10 nm at 355 nm laser excitation) leads to strong influence of the nanolayer parameters on the propagation and recombination of … fluted chair legs